Tribological behaviour of hard coatings deposited by arc-evaporation PVD

被引：104

作者：

Rodríguez, RJ ^{[1
]}

García, JA

Medrano, A

Rico, M

Sánchez, R

Martínez, R

Labrugère, C

Lahaye, M

Guette, A

机构：

[1] Ctr Ingn Avanzada Superfices, AIN, Pamplona 31191, Spain

[2] Ctr Caracterisat Mat Avances, F-33680 Pessac, France

来源：

VACUUM | 2002年 / 67卷 / 3-4期

关键词：

PVD; are electric; hard coatings; microhardness; wear; friction; tribology; AES; XPS;

D O I：

10.1016/S0042-207X(02)00248-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hard coatings deposited by arc-evaporation PVD are adequate solutions for increasing the lifetime of tools and components commonly employed in many different industrial applications. The present paper reports a comparative study of the tribological properties of the most employed hard coatings like TiN, TiCN, TiAlN, CrN and ZrN. In this study, microhardness tests were carried out by using a microindenter. Friction and wear tests were carried out by using a ball-on-disk tribometer and an optical profilometer. AUGER and XPS techniques were employed to measure the stoichiometry and thickness of the different films. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：559 / 566

页数：8

共 18 条

[1]

BETTOLI I, 1995, APPL SURF SCI, V84, P357

[2]

BYELI AV, 1992, J PHYS D, V25, P292

[3] INTERFEROMETRIC PROFILER FOR ROUGH SURFACES [J].

CABER, PJ .

APPLIED OPTICS, 1993, 32 (19) :3438-3441

[4]

CABER PJ, 1993, P SOC PHOTO-OPT INS, P2088

[5] REACTIVE PULSED LASER DEPOSITION OF TIN [J].

CRACIUN, D ;

CRACIUN, V .

APPLIED SURFACE SCIENCE, 1992, 54 :75-77

[6]

Emsberger C., 1985, J VAC SCI TECHNOL A, V3, P2415

[7] Effect of grain size on friction and wear of nanocrystalline aluminum [J].

Farhat, ZN ;

Ding, Y ;

Northwood, DO ;

Alpas, AT .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1996, 206 (02) :302-313

[8]

GUEZMMAZ M, 1997, J APPL PHYS A, V64, P407

[9] The tribological characteristics of titanium nitride, titanium carbonitride and titanium carbide coatings [J].

Guu, YY ;

Lin, JF ;

Ai, CF .

THIN SOLID FILMS, 1997, 302 (1-2) :193-200

[10]

HERZ H, 1882, MATHEMATIK, V92, P156

← 1 2 →