共 4 条
[1]
BARCOHEN Y, 1999, P 6 SPIE ANN INT S S, P1
[2]
RACINE A, 1993, P 7 IEEE INT C MICR, P128
[3]
Development of a new type piezoelectric micromotor
[J].
MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS,
1998,
:396-401
[4]
ULTRASONIC MOTOR UTILIZING ELASTIC FIN ROTOR
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1991, 30 (9B)
:2289-2291