Highly Uniform 300 mm Wafer-Scale Deposition of Single and Multilayered Chemically Derived Graphene Thin Films

被引:190
作者
Yamaguchi, Hisato [1 ]
Eda, Goki [1 ]
Mattevi, Cecilia [1 ]
Kim, HoKwon [1 ]
Chhowalla, Manish [1 ]
机构
[1] Rutgers State Univ, Dept Mat Sci & Engn, Piscataway, NJ 08854 USA
基金
英国工程与自然科学研究理事会; 美国国家科学基金会;
关键词
graphene; solution processed; large area deposition; transparent conductors; flexible; FEW-LAYER GRAPHENE; LARGE-AREA; OXIDE-FILMS; TRANSPARENT;
D O I
10.1021/nn901496p
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The deposition of atomically thin highly uniform chemically derived graphene (CDG) films on 300 mm 0251 wafers is reported. We demonstrate that the very thin films can be lifted off to form uniform membranes that can be free-standing or transferred onto any substrate. Detailed maps of thickness using Raman spectroscopy and atomic force microscopy height profiles reveal that the film thickness is very uniform and highly controllable, ranging from 1-2 layers up to 30 layers. After reduction using a variety of methods, the CDG films. are transparent and electrically active with FET devices yielding high mobilities of similar to 15 cm(2)/(V s) and sheet resistance of similar to 1 k Omega/sq at similar to 70% transparency,
引用
收藏
页码:524 / 528
页数:5
相关论文
共 35 条
[1]   Evaluation of solution-processed reduced graphene oxide films as transparent conductors [J].
Becerril, Hdctor A. ;
Mao, Jie ;
Liu, Zunfeng ;
Stoltenberg, Randall M. ;
Bao, Zhenan ;
Chen, Yongsheng .
ACS NANO, 2008, 2 (03) :463-470
[2]   Flexible transfer of aligned carbon nanotube films for integration at lower temperature [J].
Chai, Yang ;
Gong, Jingfeng ;
Zhang, Kai ;
Chan, Philip C. H. ;
Yuen, Matthew M. F. .
NANOTECHNOLOGY, 2007, 18 (35)
[3]  
EDA G, ADV MAT
[4]   Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material [J].
Eda, Goki ;
Fanchini, Giovanni ;
Chhowalla, Manish .
NATURE NANOTECHNOLOGY, 2008, 3 (05) :270-274
[5]   Transparent and conducting electrodes for organic electronics from reduced graphene oxide [J].
Eda, Goki ;
Lin, Yun-Yue ;
Miller, Steve ;
Chen, Chun-Wei ;
Su, Wei-Fang ;
Chhowalla, Manish .
APPLIED PHYSICS LETTERS, 2008, 92 (23)
[6]   Graphene-based Composite Thin Films for Electronics [J].
Eda, Goki ;
Chhowalla, Manish .
NANO LETTERS, 2009, 9 (02) :814-818
[7]   Field emission from graphene based composite thin films [J].
Eda, Goki ;
Unalan, H. Emrah ;
Rupesinghe, Nalin ;
Amaratunga, Gehan A. J. ;
Chhowalla, Manish .
APPLIED PHYSICS LETTERS, 2008, 93 (23)
[8]  
Feng XL, 2009, NAT MATER, V8, P421, DOI [10.1038/NMAT2427, 10.1038/nmat2427]
[9]   Raman spectrum of graphene and graphene layers [J].
Ferrari, A. C. ;
Meyer, J. C. ;
Scardaci, V. ;
Casiraghi, C. ;
Lazzeri, M. ;
Mauri, F. ;
Piscanec, S. ;
Jiang, D. ;
Novoselov, K. S. ;
Roth, S. ;
Geim, A. K. .
PHYSICAL REVIEW LETTERS, 2006, 97 (18)
[10]   Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates [J].
Hines, DR ;
Mezhenny, S ;
Breban, M ;
Williams, ED ;
Ballarotto, VW ;
Esen, G ;
Southard, A ;
Fuhrer, MS .
APPLIED PHYSICS LETTERS, 2005, 86 (16) :1-3