Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopying

被引:70
作者
Tan, AM [1 ]
Rodgers, K
Murrihy, JP
O'Mathuna, C
Glennon, JD
机构
[1] Natl Univ Ireland Univ Coll Cork, Dept Chem, Microseparat Lab, Cork, Ireland
[2] Natl Univ Ireland Univ Coll Cork, Natl Microelect Res Ctr, Cork, Ireland
来源
LAB ON A CHIP | 2001年 / 1卷 / 01期
关键词
D O I
10.1039/b102905n
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
A very simple and fast method for the fabrication of poly(dimethylsiloxane) (PDMS) microfluidic devices is introduced. By using a photocopying machine to make a master on transparency instead of using lithographic equipment and photoresist, the fabrication process is greatly simplified and speeded up, requiring less than 1.5 h from design to device. Through SEM characterization, any mu-channel network with a width greater than 50 mum and a depth in the range of 8-14 mum can be made by this method. After sealing to a Pyrex glass plate with micromachined platinum electrodes, a microfluidic device was made and the device was tested in FIA mode with on-chip conductometric detection without using either high voltage or other pumping methods.
引用
收藏
页码:7 / 9
页数:3
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