Waveguiding and correlated roughness effects in layered nanocomposite thin films studied by grazing-incidence small-angle x-ray scattering

被引：37

作者：

Babonneau, D. ^{[1
]}

Camelio, S. ^{[1
]}

Lantiat, D. ^{[1
]}

Simonot, L. ^{[1
]}

Michel, A. ^{[1
]}

机构：

[1] Univ Poitiers, CNRS, SP2MI, UMR 6630,Lab Phys Mat, F-86962 Futuroscope, France

来源：

PHYSICAL REVIEW B | 2009年 / 80卷 / 15期

基金：

中国国家自然科学基金;

关键词：

CROSS-SECTION; POLYMER-FILMS; SURFACE; DISTRIBUTIONS; REFLECTION; ALIGNMENT; METAL;

D O I：

10.1103/PhysRevB.80.155446

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Long-range interface correlations in C/Au/C and Ag/Si3N4 layered films consisting of metal nanoparticles embedded in amorphous matrices are investigated by atomic force microscopy, high-angle annular dark-field scanning transmission electron microscopy, x-ray reflectivity, and grazing-incidence small-angle x-ray scattering (GISAXS). We demonstrate that the GISAXS intensity of such systems is modulated by waveguiding and correlated roughness effects, which involve the use of a dynamical scattering theory to analyze the experimental data and to distinguish between both effects. Direct imaging methods and GISAXS experiments combined with quantitative analysis within the distorted wave-Born approximation thus provide complementary information. While no roughness correlation is observed in the C/Au/C trilayers, the surface roughness of the Si3N4 capping layers in the Ag/Si3N4 bilayers replicate the topography of the Ag nanoparticles resulting in a partial correlation, which decreases as the Si3N4 thickness increases.

引用

页数：12

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