Oxidation process from SnO to SnO2

被引：61

作者：

Choi, WK ^{[1
]}

Sung, H ^{[1
]}

Kim, KH ^{[1
]}

Cho, JS ^{[1
]}

Choi, SC ^{[1
]}

Jung, HJ ^{[1
]}

Koh, SK ^{[1
]}

Lee, CM ^{[1
]}

Jeong, K ^{[1
]}

机构：

[1] YONSEI UNIV, DEPT PHYS, SEOUL 120749, SOUTH KOREA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1997年 / 16卷 / 19期

关键词：

D O I：

10.1023/A:1018547813759

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1551 / 1554

页数：4

共 15 条

[1] Auger electron and X-ray photoelectron spectroscopy studies of oxidation of tin using SnOx thin films grown by reactive ion-assisted deposition [J].

Choi, WK ;

Cho, JS ;

Song, SK ;

Jung, HJ ;

Koh, SK .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (11) :5820-5824

[2] Chemical shifts and optical properties of tin oxide films grown by a reactive ion assisted deposition [J].

Choi, WK ;

Jung, HJ ;

Koh, SK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02) :359-366

[3] APPLICATION OF THE MOSSBAUER-EFFECT TO THE CHARACTERIZATION OF AN AMORPHOUS TIN-OXIDE SYSTEM [J].

COLLINS, GS ;

KACHNOWSKI, T ;

BENCZERKOLLER, N ;

PASTERNAK, M .

PHYSICAL REVIEW B, 1979, 19 (03) :1369-1373

[4]

Courtts T. J., 1990, IEEE ELECTR DEVICE L, V26, P660

[5]

GEUETS J, 1984, THIN SOLID FILMS, V121, P217

[6]

JENA AK, 1992, PHASE TRANSFORMATION, P225

[7] PHASE-COMPOSITION OF SNOX THIN-FILMS OBTAINED BY REACTIVE DC SPUTTERING [J].

LEJA, E ;

KORECKI, J ;

KROP, K ;

TOLL, K .

THIN SOLID FILMS, 1979, 59 (02) :147-155

[8]

MARTINELLI G, 1993, SENSOR ACTUAT B-CHEM, V15, P363

[9] THE EFFECT OF HEAT-TREATMENT ON THE STRUCTURAL-PROPERTIES OF ELECTRON-BEAM-EVAPORATED SNO2 FILMS [J].

REDDY, MHM ;

JAWALEKAR, SR ;

CHANDORKAR, AN .

THIN SOLID FILMS, 1989, 169 (01) :117-126

[10]

Rodriguez T, 1980, THIN SOLID FILMS, V69, P183

← 1 2 →