Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

被引：204

作者：

Zeng, JN ^{[1
]}

Low, JK ^{[1
]}

Ren, ZM ^{[1
]}

Liew, T ^{[1
]}

Lu, YF ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119260, Singapore

来源：

APPLIED SURFACE SCIENCE | 2002年 / 197卷

关键词：

zinc oxide; pulsed laser deposition; X-ray diffraction; Raman spectroscopy; transmittance spectra; sheet resistivity;

D O I：

10.1016/S0169-4332(02)00425-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：362 / 367

页数：6

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