A novel transparent pn+ junction based on indium tin oxides

被引:29
作者
Ji, ZG [1 ]
He, ZJ [1 ]
Song, YL [1 ]
Liu, K [1 ]
Xiang, Y [1 ]
机构
[1] Zhejiang Univ, State Key Lab Silicon Mat, CMSCE, Hangzhou 310027, Peoples R China
基金
中国国家自然科学基金;
关键词
SnO2; p-Type doping; pn junction;
D O I
10.1016/j.tsf.2004.02.021
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
p-Type indium-doped SnO2 thin films were successfully fabricated on degenerate n(+) indium tin oxide glass and quartz glass by sol gel dip-coating method. It was found from the X-ray diffraction results that indium-doped SnO2 thin films were in the same rutile structure as that of undoped SnO2. Hall effect measurement results showed that for In/Sn ratio less than or equal to 0.33 and process temperature approximately 525 degreesC, the indium-doped tin oxide were p-type. The I-V curve measurement of a prototype transparent pn(+) junction consisting of a layer of p-type indium-doped SnO2 and a layer of degenerate n(+) tin-doped indium oxide showed typical rectifying characteristics. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:324 / 326
页数:3
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