Fabrication and characterization of p-type ZnO films by pyrolysis of zinc-acetate-ammonia solution

被引:35
作者
Ji, ZG [1 ]
Yang, CX [1 ]
Liu, K [1 ]
Ye, ZZ [1 ]
机构
[1] Zhejiang Univ, CMSCE, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China
关键词
doping; zinc compounds; semiconducting II-VI materials;
D O I
10.1016/S0022-0248(03)01003-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
P-type zinc oxide films were prepared on glass substrates by pyrolysis of ultrasonically nebulized zinc-acetate-ammonia solution. UV-visible absorption spectra, X-ray diffraction, and Hall effect measurements were carried out. Results show that zinc oxide films prepared by this method are preferentially oriented with the c-axis perpendicular to the substrate surface. The results of Hall effect measurements show that p-type conducting ZnO films with hole concentrations as high as 2.5 x 10(17)cm(-3) were obtained by this method. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:239 / 242
页数:4
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