Rare-earth-doped GaN: Growth, properties, and fabrication of electroluminescent devices

被引:259
作者
Steckl, AJ [1 ]
Heikenfeld, JC [1 ]
Lee, DS [1 ]
Garter, MJ [1 ]
Baker, CC [1 ]
Wang, YQ [1 ]
Jones, R [1 ]
机构
[1] Univ Cincinnati, Nanoelect Lab, Cincinnati, OH 45221 USA
关键词
channel waveguides; electroluminescent devices; flat-panel displays; gallium nitride; molecular beam epitaxy; optical telecommunications; rare earths;
D O I
10.1109/JSTQE.2002.801690
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A review is presented of the fabrication, operation, and applications of rare-earth-doped GaN electroluminescent devices (ELDs). GaN:RE ELDs emit light due to impact excitation of the rare earth (RE) ions by hot carriers followed by radiative RE relaxation. By appropriately choosing the RE dopant, narrow linewidth emission can be obtained at selected wavelengths from the ultraviolet to the infrared. The deposition of GaN:RE layers is carried out by solid-source molecular beam epitaxy, and a plasma N-2 source. Growth mechanisms and optimization of the GaN layers for RE emission are discussed based on RE concentration, growth temperature, and V/III ratio. The fabrication processes and electrical models for both dc- and ac-biased devices are discussed, along with techniques for multicolor integration. Visible emission at red, green, and blue wavelengths from GaN doped with Eu, Er, and Tm has led to the development of flat-panel display (FPD) devices. The brightness characteristics of thick dielectric EL (TDEL) display devices are reviewed as a function of bias, frequency, and time. High contrast TDEL devices using a black dielectric are presented. The fabrication and operation of FPD prototypes are described. Infrared emission at 1.5 mum from GaN:Er ELDs has been applied to optical telecommunications devices. The fabrication of GaN channel waveguides by inductively coupled plasma etching is also reviewed, along with waveguide optical characterization.
引用
收藏
页码:749 / 766
页数:18
相关论文
共 70 条
[1]   Solubility and damage annealing of Er implanted single crystalline α-Al2O3 [J].
Alves, E ;
da Silva, RC ;
da Silva, MF ;
Soares, JC .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 139 (1-4) :313-317
[2]   THE GROWTH OF GAALAS GAAS GUIDED WAVE DEVICES BY MOLECULAR-BEAM EPITAXY [J].
ANDREWS, DA ;
SCOTT, EG ;
HOUGHTON, AJN ;
RODGERS, PM ;
DAVIES, GJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03) :813-815
[3]   Trailing edge light emission from ZnS:Mn and ZnS:Tb,F in a thick dielectric electroluminescent display [J].
Bailey, P ;
Carkner, D ;
Wu, X .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :931-936
[4]   Growth and morphology of Er-doped GaN on sapphire and hydride vapor phase epitaxy substrates [J].
Birkhahn, R ;
Hudgins, R ;
Lee, D ;
Steckl, AJ ;
Molnar, RJ ;
Saleh, A ;
Zavada, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (03) :1195-1199
[5]   Red light emission by photoluminescence and electroluminescence from Pr-doped GaN on Si substrates [J].
Birkhahn, R ;
Garter, M ;
Steckl, AJ .
APPLIED PHYSICS LETTERS, 1999, 74 (15) :2161-2163
[6]  
Blasse G., 1994, LUMINESCENT MAT, DOI [10.1007/978-3-642-79017-1_1, DOI 10.1007/978-3-642-79017-1_1]
[7]  
BOYD JT, 1994, PHOTONIC DEVICES SYS, pCH9
[8]  
BURN I, 1992, P INT SOC HYBR MICR, P439
[9]   Luminescence properties and defects in GaN nanocolumns grown by molecular beam epitaxy [J].
Calleja, E ;
Sánchez-García, MA ;
Sánchez, FJ ;
Calle, F ;
Naranjo, FB ;
Muñoz, E ;
Jahn, U ;
Ploog, K .
PHYSICAL REVIEW B, 2000, 62 (24) :16826-16834
[10]   STUDIES OF GAASER IMPACT EXCITED ELECTROLUMINESCENCE DEVICES [J].
CHANG, SJ ;
TAKAHEI, K .
APPLIED PHYSICS LETTERS, 1994, 65 (04) :433-435