The effects of zinc acetate and zinc chloride precursors on the preferred crystalline orientation of ZnO and Al-doped ZnO thin films obtained by spray pyrolysis

被引:161
作者
Romero, R.
Leinen, D.
Dalchiele, E. A.
Ramos-Barrado, J. R.
Martin, F.
机构
[1] Univ Malaga, Dept Fis Aplicada & Ingn Quim, Unidad Asociada CSIC, Lab Mat & Superficie, E-29071 Malaga, Spain
[2] Univ Republ Montevideo, Fac Ingn, Inst Fis, Montevideo, Uruguay
关键词
zinc oxide; spray pyrolysis; zinc chloride; X-ray diffraction;
D O I
10.1016/j.tsf.2006.07.152
中图分类号
T [工业技术];
学科分类号
08 [工学];
摘要
The effects of Zn acetate or/and Zn chloride as ZnO precursors have been studied on the c-preferred orientations of pure ZnO and ZnO films doped with aluminium obtained by spray pyrolysis. We have used aluminium nitrate and aluminium chloride as precursors for aluminium doping. The experiment uses factorial designs to reveal possible interactive effects between the ZnO precursors, and the aluminium doping on the crystalline texture obtained. We have determined the conditions to obtain c-preferred orientated thin films using mixtures of both ZnO precursors. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:1942 / 1949
页数:8
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