Extended energy loss fine structure analysis of hard and elastic carbon nitride thin films

In this article an electron energy loss spectroscopy investigation of CNx thin films is reported. The bonding, composition. and structure are discussed and a more thorough extended energy loss spectroscopy investigation is carried out to determine the interatomic distances. The extended energy loss fine structure analysis reveals a component with an unusually high frequency in the data corresponding. to an interatomic distance of approximately 7.3 Angstrom. This is suggested to originate from backscattering from distant curved atomic layers. (C) 1997 American Institute of Physics.