Electrical characteristics of diamond films diffused using Li salts

被引：5

作者：

Popovici, G

Sokolina, G

Sung, T

Prelas, MA

Ermakov, MG

Vedeneev, AS

机构：

[1] ROCKFORD DIAMOND TECHNOL, CHAMPAIGN, IL 61820 USA

[2] RUSSIAN ACAD SCI, INST CHEM PHYS, MOSCOW, RUSSIA

[3] RUSSIAN ACAD SCI, INST RADIO ENGN & ELECTR, MOSCOW 103907, RUSSIA

来源：

THIN SOLID FILMS | 1996年 / 279卷 / 1-2期

关键词：

electrical properties and measurements; diamond; lithium; conductivity;

D O I：

10.1016/0040-6090(95)08153-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Li salts (LiClO4 and Li2CO3) were used for diffusion under bias in polycrystalline diamond films. Hot-probe and conductance measurements were performed. A change in conductance of more than 10 orders of magnitude due to diffusion was observed. The p-type conductivity was obtained by conventional hot-probe measurements. The sign of the thermoelectric power was found to depend on the electric field normal to the surface. A hypothesis was advanced regarding the existence of a p-type inversion layer on the surface of the n-type hulk diffused layer.

引用

页码：93 / 97

页数：5

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