Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates

被引:161
作者
Chen, Jianyi [1 ,2 ]
Liu, Bo [1 ,2 ]
Liu, Yanpeng [1 ,2 ]
Tang, Wei [1 ,2 ]
Nai, Chang Tai [1 ,2 ]
Li, Linjun [1 ,2 ]
Zheng, Jian [1 ,2 ]
Gao, Libo [1 ,2 ]
Zheng, Yi [1 ,2 ]
Shin, Hyun Suk [3 ,4 ]
Jeong, Hu Young [3 ,4 ]
Loh, Kian Ping [1 ,2 ]
机构
[1] Natl Univ Singapore, Ctr Adv Mat 2D, Singapore 117546, Singapore
[2] Natl Univ Singapore, Dept Chem, Graphene Res Ctr, Singapore 117546, Singapore
[3] Ulsan Natl Inst Sci & Technol, UNIST Cent Res Facil UCRF, Low Dimens Carbon Mat Ctr, Dept Chem,Dept Energy Engn, Ulsan 689798, South Korea
[4] Ulsan Natl Inst Sci & Technol, Ctr Multidimens Carbon Mat, Inst Basic Sci, Ulsan 689798, South Korea
基金
新加坡国家研究基金会;
关键词
LARGE-AREA SYNTHESIS; MONOLAYER WSE2; GROWTH; MOS2; MOLYBDENUM; EMISSION; DIODES; FILMS; MONO;
D O I
10.1002/adma.201503446
中图分类号
O6 [化学];
学科分类号
070301 [无机化学];
摘要
High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V-1 s(-1) and a photoresponsivity of approximate to 1100 mA W-1, which is comparable to that of exfoliated flakes. [GRAPHICS] .
引用
收藏
页码:6722 / +
页数:7
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