Silicon-germanium bulk alloy growth by liquid encapsulated zone melting

被引：24

作者：

Bliss, D ^{[1
]}

Demczyk, B ^{[1
]}

Anselmo, A ^{[1
]}

Bailey, J ^{[1
]}

机构：

[1] PARKE MATH LAB,LOWELL,MA 01854

来源：

JOURNAL OF CRYSTAL GROWTH | 1997年 / 174卷 / 1-4期

关键词：

silicon-germanium; zone melting; alloy growth;

D O I：

10.1016/S0022-0248(96)01103-7

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Alloy crystals of silicon-germanium have been grown by the liquid-encapsulated zone-melting (LEZM) method. This method combines zone melting in a quartz container with liquid encapsulation by the molten salt CaCl2 to prevent nucleation al the container-melt interface. The thermal gradient from seed through the molten zone to the feed material was investigated to determine the alloy composition and molten zone length. Electron beam and X-ray analysis were used to characterize the crystal structure and composition of bulk crystals. Crystals of constant alloy composition at 4.5 at% are grown by this technique and reveal single-crystal structure and a high degree of compositional uniformity.

引用

页码：187 / 193

页数：7

共 5 条

[1] OPTICAL DETERMINATION OF THE COMPOSITION OF BULK SIGE MONOCRYSTALS [J].