Physical and chemical nanostructure transfer in polymer spin-transfer printing

被引:20
作者
Kim, YS
Baek, SJ
Hammond, PT
机构
[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA
[2] Seoul Natl Univ, Seoul 151742, South Korea
关键词
D O I
10.1002/adma.200306231
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
An alternative lithographic technique that creates complex nanostructures using an elastomer stamp, a spin-coating step, and a polyelectrolyte as the adhesion promotion layer is presented (see Figure). The method does not require high pressure or temperatures, and can take advantage of the elastomer stamp to reproducibly replicate chemical and physical patterns on the nanometer length scale.
引用
收藏
页码:581 / +
页数:5
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