Diagnostic Nano-Analysis of Materials Properties by Multivariate Curve Resolution Applied to Spectrum Images by S/TEM-EELS

被引:41
作者
Muto, Shunsuke [1 ]
Yoshida, Tomoko [1 ]
Tatsumi, Kazuyoshi [1 ]
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Mat Phys & Energy Engn, Nagoya, Aichi 4648603, Japan
关键词
spectrum image; multivariate curve resolution; transmission electron microscopy; electron energy-loss spectroscopy; IMPLANTED NITROGEN; STATE ANALYSIS; RESOLVED EELS; INFORMATION; BOUNDARIES; PARTICLES; ALUMINUM;
D O I
10.2320/matertrans.MC200805
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The data cube of spectrum imaging (SI) by scanning TEM (STEM) and electron energy-loss spectroscopy (EELS) or energy-filtering TEM (EF-TEM) can be treated as the two-dimensional data array, each row corresponding to the EELS spectrum at a specific position. A multivariate curve resolution (MCR) technique can then apply to the dataset, which decomposes the set of spectra into the product of the constituent pure spectral components and their corresponding relative composition matrices without any reference spectra. This method allows us to provide a two dimensional spatial distribution map of different chemical states incorporated even when the multiply spectra overlap with one another. Several application examples are presented. [doi: 10.2320/matertrans.MC200805]
引用
收藏
页码:964 / 969
页数:6
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