Ablation threshold dependence on pulse duration for copper

被引:184
作者
Hashida, M [1 ]
Semerok, AF
Gobert, O
Petite, G
Izawa, Y
Wagner, JF
机构
[1] CEA Saclay, DPC, SCPA, LALES, F-91191 Gif Sur Yvette, France
[2] CEA Saclay, DSM, DRECAM, SPAM, F-91191 Gif Sur Yvette, France
[3] Ecole Polytech, DSM, DRECAM, LSI, F-91191 Gif Sur Yvette, France
[4] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
关键词
femtosecond ablation; ablation threshold; metal;
D O I
10.1016/S0169-4332(02)00463-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Laser ablation of Cu by short pulse laser (800 nm wavelength, 70 fs pulse duration, 0.01-28 J/cm(2) fluence range) in air was studied. Three different ablation thresholds were distinguished in all metals. The ablation thresholds for Cu were found to be 0.018, 0.18, and 0.25 J/cm(2). The lowest ablation threshold was of one order of magnitude lower than the one observed previously. In the fluence range of 0.018-0.18 J/cm(2) the ablation rate was approximate to0.01 nm per pulse. A dependence of the threshold on the pulse duration was demonstrated in the range of 70 fs-5 ps. As the laser pulse duration increased, the ablation threshold had the tendency to be higher. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码:862 / 867
页数:6
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