Ablation threshold dependence on pulse duration for copper

被引：184

作者：

Hashida, M ^{[1
]}

Semerok, AF

Gobert, O

Petite, G

Izawa, Y

Wagner, JF

机构：

[1] CEA Saclay, DPC, SCPA, LALES, F-91191 Gif Sur Yvette, France

[2] CEA Saclay, DSM, DRECAM, SPAM, F-91191 Gif Sur Yvette, France

[3] Ecole Polytech, DSM, DRECAM, LSI, F-91191 Gif Sur Yvette, France

[4] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan

来源：

APPLIED SURFACE SCIENCE | 2002年 / 197卷

关键词：

femtosecond ablation; ablation threshold; metal;

D O I：

10.1016/S0169-4332(02)00463-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser ablation of Cu by short pulse laser (800 nm wavelength, 70 fs pulse duration, 0.01-28 J/cm(2) fluence range) in air was studied. Three different ablation thresholds were distinguished in all metals. The ablation thresholds for Cu were found to be 0.018, 0.18, and 0.25 J/cm(2). The lowest ablation threshold was of one order of magnitude lower than the one observed previously. In the fluence range of 0.018-0.18 J/cm(2) the ablation rate was approximate to0.01 nm per pulse. A dependence of the threshold on the pulse duration was demonstrated in the range of 70 fs-5 ps. As the laser pulse duration increased, the ablation threshold had the tendency to be higher. (C) 2002 Elsevier Science B.V All rights reserved.

引用

页码：862 / 867

页数：6