Charge pumping method for photosensor application by using amorphous indium-zinc oxide thin film transistors

被引:43
作者
Liu, Po-Tsun [1 ,2 ]
Chou, Yi-Teh [1 ,3 ]
Teng, Li-Feng [1 ,3 ]
机构
[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 30010, Taiwan
[2] Natl Chiao Tung Univ, Display Inst, Hsinchu 30010, Taiwan
[3] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 30010, Taiwan
关键词
amorphous semiconductors; II-VI semiconductors; indium compounds; optical sensors; semiconductor thin films; thin film sensors; thin film transistors; wide band gap semiconductors; zinc compounds;
D O I
10.1063/1.3155507
中图分类号
O59 [应用物理学];
学科分类号
摘要
The study investigated the photoreaction behavior of amorphous indium-zinc oxide thin film transistor (a-IZO TFT), which was thought to be insensitive to visible light. The obvious threshold voltage shift was observed after light illumination, and it exhibited slow recovery while returning to initial status. The photoreaction mechanism is well explained by the dynamic equilibrium of charge exchange reaction between O(2(g)) and O(2) in a-IZO layer. A charge pumping technique is used to confirm the mechanism and accelerate recoverability. Using knowledge of photoreaction behavior, an operation scheme of photosensing elements consist of a-IZO TFT is also demonstrated in this work.
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页数:3
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