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Single-source CVD routes to titanium phosphide

被引：21
作者：
Blackman, CS
Carmalt, CJ
Parkin, IP
Apostolico, L
Molloy, KC
White, AJP
Williams, DJ
机构：
[1] UCL, Christopher Ingold Labs, Dept Chem, London WC1H 0AJ, England
[2] Univ Bath, Dept Chem, Bath BA2 7AY, Avon, England
[3] Univ London Imperial Coll Sci Technol & Med, Dept Chem, London SW7 2AY, England
来源：
JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS | 2002年 / 13期
关键词：
D O I：
10.1039/b203613b
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.
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页码：2702 / 2709
页数：8
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