Depth profiling of dielectric SrTiO3 thin films by angle-resolved x-ray photoelectron spectroscopy

被引：21

作者：

Bhaskar, S. ^{[1
]}

Allgeyer, Dan ^{[1
]}

Smythe, John A., III ^{[1
]}

机构：

[1] Micron Technol Inc, Boise, ID 83706 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 25期

关键词：

D O I：

10.1063/1.2410232

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports the results from using angle-resolved x-ray photoelectron spectroscopy to nondestructively characterize ultrathin high-k SrTiO3 (STO) films. Results indicate that carbon is present in the STO film in the form of SrCO3 which is amorphous. SrCO3 concentration varies as a function of its position in the film as measured by the take-off angle (TOA). For films annealed at 650 degrees C, the C 1s, O 1s, and Sr 3d photoelectron transitions indicate a significant reduction in the carbonate. There is Sr enrichment on the surface, and the composition gradually converges to stoichiometric STO with Sr/Ti similar to 1 at higher TOA. (c) 2006 American Institute of Physics.

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