Application of magnetostrictive thin films for microdevices

被引：22

作者：

Body, C ^{[1
]}

Reyne, G ^{[1
]}

Meunier, G ^{[1
]}

Quandt, E ^{[1
]}

Seemann, K ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM KARLSRUHE, INST MAT RES 1, D-76021 KARLSRUHE, GERMANY

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1997年 / 33卷 / 02期

关键词：

D O I：

10.1109/20.582760

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The development of giant magnetostrictive thin films broadens the field of micro devices design. Using a nonlinear 2D modelling software developed at the LEG, two devices are studied: a magnetostrictive cantilever, and a magnetostrictive membrane driven by a magnetic field, These devices have been designed and realised by the FZK. Modelling results are compared with experimental data, and used for inverse characterisation, Applications of such devices range from optical mirrors to micropumps or valves.

引用

页码：2163 / 2166

页数：4

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