FABRICATION OF MAGNETOSTRICTIVE ACTUATORS USING RARE-EARTH (TB,SM)-FE THIN-FILMS (INVITED)

被引：105

作者：

HONDA, T ^{[1
]}

ARAI, KI ^{[1
]}

YAMAGUCHI, M ^{[1
]}

机构：

[1] TOHOKU UNIV,ELECT COMMUN RES INST,AOBA KU,SENDAI,MIYAGI 98077,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 10期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.358067

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new concept is proposed for the microactuation based upon magnetostriction. Magnetostrictive bimorph cantilever actuators and a traveling machine, composed of the magnetostrictive amorphous Tb-Fe and Sm-Fe thin films on a polyimide substrate, were fabricated. These actuators moved without power supply cables. The 3-mm-long cantilever actuator exhibited the large deflection above 100 μm in as low a magnetic field as 300 Oe and above 500 μm at resonant frequency in an alternating magnetic field of 300 Oe. Such unique characteristics suggest that magnetostriction is useful as the driving force of the microactuator.

引用

页码：6994 / 6999

页数：6

共 10 条

[1]

Ahn C. H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P1, DOI 10.1109/MEMSYS.1993.296940

[2]

Clark A. E., 1980, Ferromagnetic materials. A handbook on the properties of magnetically ordered substances, vol.1, P531, DOI 10.1016/S1567-2719(80)01010-4

[3] MAGNETOSTRICTION OF AMORPHOUS TBXFE1-X THIN-FILMS [J].

FORESTER, DW ;

VITTORIA, C ;

SCHELLENG, J ;

LUBITZ, P .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (03) :1966-1968

[4]

Fukuda T., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P210, DOI 10.1109/MEMSYS.1991.114798

[5]

Guckel H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P7, DOI 10.1109/MEMSYS.1993.296942

[6] DEPENDENCE OF MAGNETOSTRICTION OF SPUTTERED TB-FE FILMS ON PREPARATION CONDITIONS [J].

HAYASHI, Y ;

HONDA, T ;

ARAI, KI ;

ISHIYAMA, K ;

YAMAGUCHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) :3129-3131

[7] MAGNETOSTRICTION OF SPUTTERED SM-FE THIN-FILMS [J].

HONDA, T ;

HAYASHI, Y ;

ARAI, KI ;

ISHIYAMA, K ;

YAMAGUCHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) :3126-3131

[8] PERFORMANCE-CHARACTERISTICS OF PIEZOELECTRIC POLYMER FLEXURE MODE DEVICES [J].

MARCUS, MA .

FERROELECTRICS, 1984, 57 (1-4) :203-220

[9] Analysis of bi-metal thermostats [J].

Timoshenko, S .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA AND REVIEW OF SCIENTIFIC INSTRUMENTS, 1925, 11 (03) :233-255

[10] MICROROBOTS AND MICROMECHANICAL SYSTEMS [J].

TRIMMER, WSN .

SENSORS AND ACTUATORS, 1989, 19 (03) :267-287

← 1 →