MICROROBOTS AND MICROMECHANICAL SYSTEMS

[1] BARTH PW, 1985, 3RD P INT C SOL STAT, P371

[2] INK JET PRINTING NOZZLE ARRAYS ETCHED IN SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (02) : 135 - 137

[3] BASSOUS E, 1978, IEEE T ELECTRON DEV, V25, P178

[4] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[5] BULK AND SURFACE CONDUCTION IN CVD SIO2 AND PSG PASSIVATION LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (03) : 386 - 391

[6] Drexler K. E., 1986, ENGINES OF CREATION

[7] EHRFELD W, 1987, NOV IEEE MICR ROB TE

[8] ESASHI M, 1987, 4TH INT C SOL STAT S, P839

[9] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[10] FAN LS, 1987, 4TH INT C SOL STAT S, P849

[1] BARTH PW, 1985, 3RD P INT C SOL STAT, P371

[2] INK JET PRINTING NOZZLE ARRAYS ETCHED IN SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (02) : 135 - 137

[3] BASSOUS E, 1978, IEEE T ELECTRON DEV, V25, P178

[4] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[5] BULK AND SURFACE CONDUCTION IN CVD SIO2 AND PSG PASSIVATION LAYERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (03) : 386 - 391

[6] Drexler K. E., 1986, ENGINES OF CREATION

[7] EHRFELD W, 1987, NOV IEEE MICR ROB TE

[8] ESASHI M, 1987, 4TH INT C SOL STAT S, P839

[9] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[10] FAN LS, 1987, 4TH INT C SOL STAT S, P849