MICROROBOTS AND MICROMECHANICAL SYSTEMS

被引:272
作者
TRIMMER, WSN
机构
来源
SENSORS AND ACTUATORS | 1989年 / 19卷 / 03期
关键词
D O I
10.1016/0250-6874(89)87079-9
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:267 / 287
页数:21
相关论文
共 40 条
  • [11] FEELY WE, 1988, JUN P IEEE SOL STAT, P13
  • [12] FEURY AM, 1986, 1986 IEEE SOL STAT S
  • [13] Feynman RP., 1960, THERES PLENTY ROOM B
  • [14] THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING
    FUJITA, H
    OMODAKA, A
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 731 - 734
  • [15] FUJITA H, 1987, 4TH INT C SOL STAT S, P861
  • [16] GABRIEL KJ, 1987, 4TH INT C SOL STAT S, P853
  • [17] FINE-GRAINED POLYSILICON FILMS WITH BUILT-IN TENSILE STRAIN
    GUCKEL, H
    BURNS, DW
    VISSER, CCG
    TILMANS, HAC
    DEROO, D
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 800 - 801
  • [18] ELECTROMECHANICAL DEVICES UTILIZING THIN SI DIAPHRAGMS
    GUCKEL, H
    LARSEN, S
    LAGALLY, MG
    MOORE, G
    MILLER, JB
    WILEY, JD
    [J]. APPLIED PHYSICS LETTERS, 1977, 31 (09) : 618 - 619
  • [19] HANFUSA H, 1978, OCT IFAC S INF CONTR, P127
  • [20] POLYCRYSTALLINE SILICON MICROMECHANICAL BEAMS
    HOWE, RT
    MULLER, RS
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1420 - 1423