MICROROBOTS AND MICROMECHANICAL SYSTEMS

[11] FEELY WE, 1988, JUN P IEEE SOL STAT, P13

[12] FEURY AM, 1986, 1986 IEEE SOL STAT S

[13] Feynman RP., 1960, THERES PLENTY ROOM B

[14] THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 731 - 734

[15] FUJITA H, 1987, 4TH INT C SOL STAT S, P861

[16] GABRIEL KJ, 1987, 4TH INT C SOL STAT S, P853

[17] FINE-GRAINED POLYSILICON FILMS WITH BUILT-IN TENSILE STRAIN [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 800 - 801

[18] ELECTROMECHANICAL DEVICES UTILIZING THIN SI DIAPHRAGMS [J]. APPLIED PHYSICS LETTERS, 1977, 31 (09) : 618 - 619

[19] HANFUSA H, 1978, OCT IFAC S INF CONTR, P127

[20] POLYCRYSTALLINE SILICON MICROMECHANICAL BEAMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1420 - 1423

[11] FEELY WE, 1988, JUN P IEEE SOL STAT, P13

[12] FEURY AM, 1986, 1986 IEEE SOL STAT S

[13] Feynman RP., 1960, THERES PLENTY ROOM B

[14] THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 731 - 734

[15] FUJITA H, 1987, 4TH INT C SOL STAT S, P861

[16] GABRIEL KJ, 1987, 4TH INT C SOL STAT S, P853

[17] FINE-GRAINED POLYSILICON FILMS WITH BUILT-IN TENSILE STRAIN [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 800 - 801

[18] ELECTROMECHANICAL DEVICES UTILIZING THIN SI DIAPHRAGMS [J]. APPLIED PHYSICS LETTERS, 1977, 31 (09) : 618 - 619

[19] HANFUSA H, 1978, OCT IFAC S INF CONTR, P127

[20] POLYCRYSTALLINE SILICON MICROMECHANICAL BEAMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : 1420 - 1423