THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING

[1] BOLLEE B, 1969, PHILIPS TECH REV, V30, P178

[2] EFFECTS OF MATERIAL AND PROCESSING PARAMETERS ON DIELECTRIC STRENGTH OF THERMALLY GROWN SIO2 FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (10) : 1287 - +

[3] FUJITA H, 1987, 4TH INT C SOL STAT S, P861

[4] FUJITA H, 1987, NOV P IEEE MICR ROB, P83

[5] COMPUTER CALCULATION OF ELECTRICAL FIELDS [J]. IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1986, 21 (06): : 869 - 872

[6] PRINTZ H, 1969, HOCHSPANNUNGSFELDER

[7] DESIGN CONSIDERATIONS FOR A PRACTICAL ELECTROSTATIC MICRO-MOTOR [J]. SENSORS AND ACTUATORS, 1987, 11 (02): : 189 - 206

[8] TRIMMER WSN, 1987, 4TH INT C SOL STAT S, P857

[9] Trump J. G., 1947, ELECT ENG, V66, P525, DOI [10.1109/ee.1947.6443559, DOI 10.1109/EE.1947.6443559]

[10] 1981, HDB ELECTROSTATICS, P651

[1] BOLLEE B, 1969, PHILIPS TECH REV, V30, P178

[2] EFFECTS OF MATERIAL AND PROCESSING PARAMETERS ON DIELECTRIC STRENGTH OF THERMALLY GROWN SIO2 FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (10) : 1287 - +

[3] FUJITA H, 1987, 4TH INT C SOL STAT S, P861

[4] FUJITA H, 1987, NOV P IEEE MICR ROB, P83

[5] COMPUTER CALCULATION OF ELECTRICAL FIELDS [J]. IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1986, 21 (06): : 869 - 872

[6] PRINTZ H, 1969, HOCHSPANNUNGSFELDER

[7] DESIGN CONSIDERATIONS FOR A PRACTICAL ELECTROSTATIC MICRO-MOTOR [J]. SENSORS AND ACTUATORS, 1987, 11 (02): : 189 - 206

[8] TRIMMER WSN, 1987, 4TH INT C SOL STAT S, P857

[9] Trump J. G., 1947, ELECT ENG, V66, P525, DOI [10.1109/ee.1947.6443559, DOI 10.1109/EE.1947.6443559]

[10] 1981, HDB ELECTROSTATICS, P651