DEPENDENCE OF MAGNETOSTRICTION OF SPUTTERED TB-FE FILMS ON PREPARATION CONDITIONS

被引：49

作者：

HAYASHI, Y ^{[1
]}

HONDA, T ^{[1
]}

ARAI, KI ^{[1
]}

ISHIYAMA, K ^{[1
]}

YAMAGUCHI, M ^{[1
]}

机构：

[1] TOKIN CORP,SENDAI RES LAB,SENDAI 982,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.280877

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Amorphous Tb-Fe thin films prepared by sputtering method in the compositional range TbxFe1-x (x=0-0.5) have been investigated in view of their potential for use in electromagnetic thin film actuators. We examined the magnetostriction and the coercive force for the Tb-Fe films for different sputtering conditions to obtain both soft magnetic properties and large magnetostriction in this system. As a result, we obtained Tb-Fe thin films having large magnetostrictions (180X(10-6) at 1kOe) and low coercive force (60-70 Oe). These films were prepared under the conditions of the composition of 45-50at%Tb, Ar gas pressure of 4mTorr, rf input power of 200W and using water cooled substrates. A trial actuator using magnetostrictive thin films is also reported.

引用

页码：3129 / 3131

页数：3

共 10 条

[1] ANOMALOUS THERMAL-EXPANSION AND MAGNETOSTRICTION OF SINGLE-CRYSTAL TB.27DY.73FE2 [J].