THERMALLY EXCITED SILICON MICROACTUATORS

[1] FAMPEL JH, 1981, ENG DESIGN

[2] GUSTAFSSON K, 1987, 4 INT C SENS ACT, P212

[3] HIRATA M, 1985, 3RD P INT C SOL STAT, P287

[4] 128X128 DEFORMABLE MIRROR DEVICE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (05) : 539 - 545

[5] KLOECK B, 1987, 4TH INT C SOL STAT S, P116

[6] MULLER RS, 1985, 1984 IEEE ELECTROTEC, P56

[7] Petersen K. E., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P2

[8] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[9] SILICON TORSIONAL SCANNING MIRROR [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 631 - 637

[10] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (08) : 521 - 523

[1] FAMPEL JH, 1981, ENG DESIGN

[2] GUSTAFSSON K, 1987, 4 INT C SENS ACT, P212

[3] HIRATA M, 1985, 3RD P INT C SOL STAT, P287

[4] 128X128 DEFORMABLE MIRROR DEVICE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (05) : 539 - 545

[5] KLOECK B, 1987, 4TH INT C SOL STAT S, P116

[6] MULLER RS, 1985, 1984 IEEE ELECTROTEC, P56

[7] Petersen K. E., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P2

[8] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[9] SILICON TORSIONAL SCANNING MIRROR [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 631 - 637

[10] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (08) : 521 - 523