共 20 条
- [1] FAMPEL JH, 1981, ENG DESIGN
- [2] GUSTAFSSON K, 1987, 4 INT C SENS ACT, P212
- [3] HIRATA M, 1985, 3RD P INT C SOL STAT, P287
- [4] 128X128 DEFORMABLE MIRROR DEVICE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (05) : 539 - 545
- [5] KLOECK B, 1987, 4TH INT C SOL STAT S, P116
- [6] MULLER RS, 1985, 1984 IEEE ELECTROTEC, P56
- [7] Petersen K. E., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P2
- [9] SILICON TORSIONAL SCANNING MIRROR [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 631 - 637
- [10] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (08) : 521 - 523