MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON

被引：67

作者：

PETERSEN, KE ^{[1
]}

机构：

[1] IBM CORP, RES LAB, SAN JOSE, CA 95193 USA

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 08期

关键词：

D O I：

10.1063/1.89761

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：521 / 523

页数：3

相关论文

共 8 条

[1] ETHYLENE DIAMINE-PYROCATECHOL-WATER MIXTURE SHOWS ETCHING ANOMALY IN BORON-DOPED SILICON
BOHG, A
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (02) : 401 - &
[2] Bruckner R., 1970, Journal of Non-Crystalline Solids, V5, P123, DOI 10.1016/0022-3093(70)90190-0
[3] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON
FINNE, RM
KLEIN, DL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 965 - &
[4] THIN-FILM DYE-LASER WITH ETCHED CAVITY
HU, C
KIM, S
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 582 - 585
[5] RESONANT GATE TRANSISTOR
NATHANSON, HC
NEWELL, WE
WICKSTROM, RA
DAVIS, JR
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (03) : 117 - +
[6] EPITAXIAL V-GROOVE BIPOLAR INTEGRATED-CIRCUIT PROCESS
RODGERS, TJ
MEINDL, JD
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (03) : 226 - 232
[7] MIRROR-MATRIX TUBE - NOVEL LIGHT VALVE FOR PROJECTION DISPLAYS
THOMAS, RN
GULDBERG, J
NATHANSON, HC
MALMBERG, PR
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, 22 (09) : 765 - 775
[8] [No title captured]