Fabrication and structural characterization of (Ba,Sr)TiO3 thin films produced by Electrostatic Spray Assisted Vapour Deposition

被引：11

作者：

Du, Jing ^{[1
]}

Choy, Kwang-Leong ^{[1
]}

机构：

[1] Univ Nottingham, Sch Mech Mat & Mfg Engn, Nottingham NG7 2RD, England

来源：

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS | 2006年 / 26卷 / 5-7期

关键词：

(Ba; Sr)TiO3; Electrostatic Spray Assisted Vapour Deposition; thin films;

D O I：

10.1016/j.msec.2005.09.046

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of perovskite (Ba,Sr)TiO3 (BST) system are promising candidates for microelectronic devices that can be integrated into semiconductor technology. The lead-free solid solution BaxSr1-xTiO3 is a high permittivity dielectric material with low loss and suitable for use in dynamic random access memory cells, tunable microwave devices, by-pass capacitors and infrared detectors. A versatile and cost-effective Electrostatic Spray Assisted Vapour Deposition (ESAVD) process has been used to fabricate nanostructured BST film. The crystal structure, surface morphology and homogeneity of composition of BST thin films have been investigated using a combination of XRD, SEM, AFM, Raman spectroscopy and XPS techniques. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：1117 / 1121

页数：5

共 14 条

[1] Humidity sensing properties of (Ba, Sr) TiO3 thin films grown by hydrothermal-electrochemical method [J].

Agarwal, S ;

Sharma, GL .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 85 (03) :205-211

[2] Processing-structure-property of nanocrystalline materials produced using novel and cost-effective ESAVD-based methods [J].

Choy, KL .

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2001, 16 (1-2) :139-145

[3]

CHOY KL, 2002, INNOVATION PROCESSIN

[4]

CHOY KL, 1995, Patent No. 9525505

[5] Electrostatic spray assisted vapour deposition of TiO2-based films [J].

Du, J ;

Choy, KL .

SOLID STATE IONICS, 2004, 173 (1-4) :119-124

[6] Microstructure and dielectric properties of Ba1-xSrxTiO3 films grown on LaAlO3 substrates [J].

Gim, Y ;

Hudson, T ;

Fan, Y ;

Kwon, C ;

Findikoglu, AT ;

Gibbons, BJ ;

Park, BH ;

Jia, QX .

APPLIED PHYSICS LETTERS, 2000, 77 (08) :1200-1202

[7] Crystallization of sol-gel-derived barium strontium titanate thin films [J].

Gust, MC ;

Momoda, LA ;

Evans, ND ;

Mecartney, ML .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2001, 84 (05) :1087-1092

[8] DEPOSITION OF EXTREMELY THIN (BA,SR)TIO3 THIN-FILMS FOR ULTRA-LARGE-SCALE INTEGRATED DYNAMIC RANDOM-ACCESS MEMORY APPLICATION [J].

HWANG, CS ;

PARK, SO ;

CHO, HJ ;

KANG, CS ;

KANG, HK ;

LEE, SI ;

LEE, MY .

APPLIED PHYSICS LETTERS, 1995, 67 (19) :2819-2821

[9] Novel barium strontium titanate Ba0.5Sr0.5TiO3/MgO thin film composites for tunable microwave devices [J].

Jain, M ;

Majumder, SB ;

Katiyar, RS ;

Bhalla, AS .

MATERIALS LETTERS, 2003, 57 (26-27) :4232-4236

[10] Thin film multilayer conductor ferroelectric tunable microwave components for communication applications [J].

Miranda, FA ;

Romanofsky, RR ;

VanKeuls, FW ;

Mueller, CH ;

Treece, RE ;

Rivkin, TV .

INTEGRATED FERROELECTRICS, 1997, 17 (1-4) :231-246

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