Crystallization of sol-gel-derived barium strontium titanate thin films

被引:64
作者
Gust, MC [1 ]
Momoda, LA
Evans, ND
Mecartney, ML
机构
[1] Univ Calif Irvine, Dept Chem & Biochem Engn & Mat Sci, Irvine, CA 92697 USA
[2] Hughes Res Labs, Malibu, CA 90265 USA
[3] Oak Ridge Inst Sci & Educ, Oak Ridge, TN 37831 USA
关键词
D O I
10.1111/j.1151-2916.2001.tb00794.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Microstructural development of thin-film barium strontium titanate (BaxSr1-xTiO3) as a function of strontium concentration and thermal treatment were studied, using transmission electron microscopy (TEM) and X-ray diffractometry (XRD), Thin films, similar to 250 nm thick, were spin-coated onto Pt/Ti/ SiO2/Si substrates, using methoxypropoxide alkoxide precursors, and crystallized by heat-treating at 700 degreesC. All films had the cubic perovskite structure, and their lattice parameters varied linearly with strontium content. Films with higher strontium concentrations had a larger average grain size, In situ TEM heating experiments, combined with differential thermal analysis/thermogravimetric analysis results, suggest that the gel films crystallize as an intermediate carbonate phase, BaxSr1-xTiO2CO3 (with a solid solution range from x 1 to x = 0). Before decomposition at 600 degreesC, this carbonate phase inhibits the formation of the desired perovskite phase.
引用
收藏
页码:1087 / 1092
页数:6
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