Microstructuring of silicon by electro-discharge machining (EDM) .2. applications

被引：29

作者：

Heeren, PH

Reynaerts, D

VanBrussel, H

Beuret, C

Larsson, O

Bertholds, A

机构：

[1] KATHOLIEKE UNIV LEUVEN,DIV PROD ENGN MACHINE DESIGN & AUTOMAT,B-3001 HEVERLEE,BELGIUM

[2] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2007 NEUCHATEL,SWITZERLAND

[3] MEMS TECHNOL,IND MICROELECT CTR AB IMC,S-16421 KISTA,SWEDEN

[4] AGIE,MICRO TECHNOL SECT,CH-6616 LOSONE,SWITZERLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 61卷 / 1-3期

关键词：

silicon micromachining; microelectromechanical system (MEMS); electro-discharge machining;

D O I：

10.1016/S0924-4247(97)80293-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro electro-discharge machining (EDM) is introduced as a new technique to produce microstructures. The main advantages of micro-EDM are its low installation cost, high accuracy and large design freedom, Micro-EDM can indeed easily machine complex three-dimensional shapes that prove difficult for etching techniques, The primary applications of micro-EDM are in rapid prototyping and products with small batch sizes. However, the technique is versatile enough to be adapted to large series, Several examples are given of the possibilities of micro-EDM: an elastic force motor, micromirrors, an acceleration sensor and a microspring. Also the machine on which these structures were made is introduced. EDM requires electrodes as a tool. A reliable method for producing these electrodes, with custom shape and small sizes, is also presented.

引用

页码：379 / 386

页数：8

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