Development of new capacitive strain sensors based on thick film polymer and cermet technologies

被引：71

作者：

Arshak, KI ^{[1
]}

McDonagh, D ^{[1
]}

Durcan, MA ^{[1
]}

机构：

[1] Univ Limerick, Microelect & Semicond Res Grp, Dept Elect & Comp Engn, Limerick, Ireland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 79卷 / 02期

关键词：

capacitive strain sensor; thick film sensors; polymer dielectrics; cermet dielectrics;

D O I：

10.1016/S0924-4247(99)00275-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, the strain sensing characteristics of new thick film capacitive sensors are presented. New cermet and polymer dielectric pastes based on lead-zirconate-titanate (PZT) and polyvinylidene fluoride (PVDF) have been developed. The screen printing technique has been used to fabricate the sensors on 96% alumina substrates. Various strain gauge characteristics have been studied, including the electrical properties of both the cermet and polymeric films. Both the cermet and polymer sensors exhibit good dielectric properties with gauge factors comparable to piezoresistive strain sensors. An application circuit based on integrated bipolar arrays incorporating the new capacitive strain sensors was designed and tested. The output from this circuit is a frequency that is proportional to the applied strain. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：102 / 114

页数：13

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