Whisker probes

被引:18
作者
Givargizov, EI
Stepanova, AN
Obolenskaya, LN
Mashkova, ES
Molchanov, VA
Givargizov, ME
Rangelow, IW
机构
[1] Russian Acad Sci, Inst Crystallog, Moscow 117333, Russia
[2] Moscow State Pedag Univ, Inst Nucl Phys, Moscow 119435, Russia
[3] Crystals & Technol Ltd, Moscow, Russia
[4] Univ Kassel, D-3500 Kassel, Germany
关键词
D O I
10.1016/S0304-3991(99)00141-2
中图分类号
TH742 [显微镜];
学科分类号
摘要
A new technology for preparation of AFM probes based on whiskers is proposed. The technology posseses significant advantages to the whisker probes over standard ones as related to the shapes of the probes, as well as to the properties of the cantilevers on which the whiskers are grown. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:57 / 61
页数:5
相关论文
共 9 条
  • [1] DAGATA JA, 1995, SOLID STATE TECHNOL, V38, P91
  • [2] DIMENSIONAL METROLOGY WITH SCANNING PROBE MICROSCOPES
    GRIFFITH, JE
    GRIGG, DA
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : R83 - R109
  • [3] SUBMICRON SI TRENCH PROFILING WITH AN ELECTRON-BEAM FABRICATED ATOMIC FORCE MICROSCOPE TIP
    LEE, KL
    ABRAHAM, DW
    SECORD, F
    LANDSTEIN, L
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3562 - 3568
  • [4] SILICON AS A MECHANICAL MATERIAL
    PETERSEN, KE
    [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457
  • [5] Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness
    Rangelow, IW
    Shi, F
    Hudek, P
    Grabiec, P
    Volland, B
    Givargizov, EI
    Stepanova, AN
    Obolenskaya, LN
    Mashkova, ES
    Molchanov, VA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06): : 3185 - 3191
  • [6] RANGELOW IW, 1997, PLASMA SURF ENG, V12, P234
  • [7] RANGELOW IW, 1996, DEEP ETCHING SILICON
  • [8] Preparation of ultrasharp diamond tip emitters by ion-beam etching
    Stepanova, AN
    Givargizov, EI
    Bormatova, LV
    Zhirnov, VV
    Mashkova, ES
    Molchanov, AV
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02): : 678 - 680
  • [9] VAPOR-LIQUID-SOLID MECHANISM OF SINGLE CRYSTAL GROWTH ( NEW METHOD GROWTH CATALYSIS FROM IMPURITY WHISKER EPITAXIAL + LARGE CRYSTALS SI E )
    WAGNER, RS
    ELLIS, WC
    [J]. APPLIED PHYSICS LETTERS, 1964, 4 (05) : 89 - &