Measurement of thermal diffusivities of thin metallic films using the ac calorimetric method

被引:48
作者
Yamane, T
Mori, Y
Katayama, S
Todoki, M
机构
[1] Toray Research Center, Inc., Otsu, Shiga 520
关键词
D O I
10.1063/1.365882
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thermal diffusivities of thin films of evaporated metal less than 1x10(-6) m thick have been measured using the light-irradiation ac calorimetric method. The thermal diffusivities of metallic thin films become smaller than those of the bulk as the thickness of the metallic thin films decreases. It is determined, using x-ray diffraction measurement, that the decrease of thermal diffusivity of thin films of evaporated metal is caused by a decrease in crystalline size. (C) 1997 American Institute of Physics.
引用
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页码:1153 / 1156
页数:4
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