Colloid monolayers as versatile lithographic masks

被引:242
作者
Burmeister, F
Schafle, C
Matthes, T
Bohmisch, M
Boneberg, J
Leiderer, P
机构
[1] Department of Physics, University of Konstanz, D-78434 Konstanz
关键词
D O I
10.1021/la9621123
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Hexagonally closed packed monolayers of colloids have found more and more applications, e.g. as lithographic masks. The monolayers are usually produced with the help of a self-organizing process where a suspension of colloids is applied to the desired substrate and left to dry. This method requires a good wettability and smoothness of the substrate, which severely limits the number of possible substrates. We present a new method for the application of colloid monolayers to almost any surface where these difficulties are circumvented. At first the monolayers are fabricated on glass substrates and afterwards floated off on a water surface. From there, they are transferred to the desired substrate. Examples where transferred monolayers were used as lithographic masks are shown on glass, indium tin oxide, and tungsten diselenide. The transfer of a colloid monolayer to a copper grid for transmission electron microscopy demonstrates the applicability of the technique to curved surfaces as well.
引用
收藏
页码:2983 / 2987
页数:5
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