Wide range control of the sustaining voltage of ESD protection elements realized in a smart power technology

被引:19
作者
Gossner, H
Müller-Lynch, T
Esmark, K
Stecher, M
机构
来源
ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM PROCEEDINGS, 1999 | 1999年
关键词
D O I
10.1109/EOSESD.1999.818985
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Highly efficient ESD protection structures with a sustaining voltage > 40 V are realized iri a smart power technology. They guarantee an excellent ESD protection at high voltage pins without the danger of transient latch-up. Compared to the vertical npn transistor a shift of the sustaining voltage of 20 V has been achieved purely by a layout modification of the buried layer. The high ESD performance has been proven on product level by an ESD hardness of > 8 kV (HBM).
引用
收藏
页码:19 / 27
页数:9
相关论文
共 14 条
[1]  
Amerasekera A., 1995, ESD SILICON INTEGRAT
[2]  
FURBOCK C, 1999, EOS ESD S ORL SEPT, P27
[3]  
FURBOCK C, 1999, ESSDERC 99 LEUV
[4]  
FURBOCK F, COMMUNICATION
[5]  
GANDHI SK, 1977, SEMICONDUCTOR POWER
[6]   HETERODYNE INTERFEROMETER FOR THE DETECTION OF ELECTRIC AND THERMAL SIGNALS IN INTEGRATED-CIRCUITS THROUGH THE SUBSTRATE [J].
GOLDSTEIN, M ;
SOLKNER, G ;
GORNIK, E .
MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) :431-436
[7]  
*ISE INT SYST ENG, 1998, CH8005 ISE TCAD
[8]  
*ISO, 1990, 7637 ISO
[9]  
Ker MD, 1998, ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM PROCEEDINGS, P72
[10]   Using an SCR as ESD protection without latch-up danger [J].
Notermans, G ;
Kuper, F ;
Luchies, JM .
MICROELECTRONICS AND RELIABILITY, 1997, 37 (10-11) :1457-1460