Development of a nanoscale fatigue measurement technique and its application to ultrathin amorphous carbon coatings

被引：43

作者：

Li, XD

Bhushan, B

机构：

[1] Ohio State Univ, Nanotribol Lab Informat Storage, Columbus, OH 43210 USA

[2] Ohio State Univ, MEMSINEMS, Columbus, OH 43210 USA

来源：

SCRIPTA MATERIALIA | 2002年 / 47卷 / 07期

关键词：

fatigue; nanoindentation; continuous stiffness; delamination and buckling;

D O I：

10.1016/S1359-6462(02)00181-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A technique to study nanofatigue behavior of coatings has been developed. Based on measurements of amorphous carbon coatings (DLC), higher hardness, fracture toughness and adhesion strength are responsible for a longer fatigue life. This technique can be satisfactorily used to simulate and study damage in head-disk and MEMS/NEMS interfaces. (C) 2002 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.

引用

页码：473 / 479

页数：7

共 9 条

[1] Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments [J].