Stable extraction of threshold voltage using transconductance change method for CMOS modeling, simulation and characterization

被引:3
作者
Choi, WY
Woo, DS
Choi, BY
Lee, JD
Park, BG
机构
[1] Seoul Natl Univ, Inter Univ Semicond Res Ctr, Seoul 151742, South Korea
[2] Seoul Natl Univ, Sch Elect Engn, Seoul 151600, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 4B期
关键词
extraction; algorithm; threshold voltage; transconductance change; MOSFET;
D O I
10.1143/JJAP.43.1759
中图分类号
O59 [应用物理学];
学科分类号
摘要
We proposed a stable extraction algorithm for threshold voltage using transconductance change method by optimizing node interval. With the algorithm, noise-free g(m2) (= dg(m)/dV(GS)) profiles can be extracted within one-percent error, which leads to more physically-meaningful threshold voltage calculation by the transconductance change method. The extracted threshold voltage predicts the gate-to-source voltage at which the surface potential is within kT/q of phi(s) = 2phi(f) + V-SB. Our algorithm makes the transconductance change method more practical by overcoming noise problem. This threshold voltage extraction algorithm yields the threshold roll-off behavior of nanoscale metal oxide semiconductor field effect transistor (MOSFETs) accurately and makes it possible to calculate the surface potential phi(s) at any other point on the drain-to-source current (I-DS) versus gate-to-source voltage (V-GS) curve. It will provide us with a useful analysis tool in the field of device modeling, simulation and characterization.
引用
收藏
页码:1759 / 1762
页数:4
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