Innovative M(hfa)2•TMEDA (M=Cu, Co) Precursors for the CVD of Copper-Cobalt Oxides: an Integrated Theoretical and Experimental Approach

被引:9
作者
Gasparotto, A. [1 ]
Barreca, D.
Devi, A.
Fischer, R. A.
Fois, E.
Gamba, A.
Maccato, C. [1 ]
Seraglia, R.
Tabacchi, G.
Tondello, E. [1 ]
机构
[1] Univ Padua, Dept Chem, I-35131 Padua, Italy
来源
EUROCVD 17 / CVD 17 | 2009年 / 25卷 / 08期
关键词
THIN-FILMS; BASIS-SETS; PSEUDOPOTENTIALS; GROUP-11; ELEMENTS; ATOMS;
D O I
10.1149/1.3207638
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
This work is focused on a joint experimental and theoretical characterization of M(hfa)(2)center dot TMEDA complexes [M=Cu, Co; hfa=1,1,1,5,5,5 -hexafluoro-2,4-pentanedi onate; TMEDA=N,N, N',N '-tetramethylethylenediamine], innovative CVD precursors for Cu-Co oxides. The structural, vibrational and thermal properties of the above compounds, as well as their fragmentation pathways, have been thoroughly analyzed by Fourier Transform Infrared Spectroscopy (FT-IR), Electrospray Ionization Mass Spectrometry (ESI-MS) and tandem Mass Spectrometry (MS/MS), ThermoGravimetric Analysis (TGA), Differential Scanning Calorimetry (DSC). Results obtained by the above techniques have been integrated by ab-initio Density Functional Theory (DFT) calculations. The most relevant results, with particular regard to CVD applications of the target compounds, are presented and discussed.
引用
收藏
页码:549 / 556
页数:8
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