Compositionally step-varied (Pb, Ca)TiO3 thin films with enhanced dielectric and ferroelectric properties

被引：38

作者：

Bao, DH ^{[1
]}

Zhang, LY ^{[1
]}

Yao, X ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 08期

关键词：

D O I：

10.1063/1.125939

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Compositionally step-varied (Pb, Ca)TiO3 thin films were prepared on platinum-coated silicon substrates by a monoethanolamine-modified sol-gel technique. The dielectric constant and dissipation factor were found to be 342 and 0.019, respectively, for thin films of 0.6 mu m in thickness annealed at 550 degrees C for 60 min. The remanent polarization and coercive field were 37.7 mu C/cm(2) and 60.4 kV/cm, respectively. The leakage current was 1.31x10(-7) A/cm(2) at the voltage of 5 V. The compositionally step-varied (Pb, Ca)TiO3 thin films had enhanced dielectric and ferroelectric properties which were suitable for various device applications. (C) 2000 American Institute of Physics. [S0003-6951(00)03008-4].

引用

页码：1063 / 1065

页数：3

共 24 条

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