Indentation size effects on the creep behavior of nanocrystalline tetragonal Ta films

被引:48
作者
Cao, Z. H. [1 ,2 ]
Li, P. Y. [1 ,2 ]
Lu, H. M. [1 ,2 ]
Huang, Y. L. [3 ]
Zhou, Y. C. [3 ]
Meng, X. K. [1 ,2 ]
机构
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
[2] Nanjing Univ, Dept Mat Sci & Engn, Nanjing 210093, Peoples R China
[3] Xiangtan Univ, Fac Mat & Photoelect Phys, Xiangtan 411105, Peoples R China
关键词
Nanoindentation; Creep; Nanocrystalline materials; Ta; TANTALUM THIN-FILMS; NANO-INDENTATION; NANOINDENTATION CREEP; HARDNESS; SUPERPLASTICITY; PLASTICITY; STRENGTH; MODEL; LAW;
D O I
10.1016/j.scriptamat.2008.11.016
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nanoindentation creep tests were carried out at maximum indentation loads from 500 to 9000 mu N to study the indentation size effects (ISEs) on the creep behavior of nanocrystallline tetragonal Ta films. The experimental results show that the hardness, creep strain rate and stress exponent are all indentation size-dependent. The ISE oil the creep behavior is explained by grain boundary diffusion and sliding, and self-diffusion along the indenter/specimen interface and along the free surface of specimen. (c) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:415 / 418
页数:4
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