Optical properties of Si nanocrystals prepared by magnetron sputtering

被引：25

作者：

Baru, VG

Chernushich, AP

Luzanov, VA

Stepanov, GV

Zakharov, LY

ODonnell, KP

Bradley, IV

Melnik, NN

机构：

[1] UNIV STRATHCLYDE,GLASGOW G4 0NG,LANARK,SCOTLAND

[2] RUSSIAN ACAD SCI,PN LEBEDEV PHYS INST,MOSCOW 117924,RUSSIA

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 27期

关键词：

D O I：

10.1063/1.116967

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Visible photoluminescence (PL), optical transmission, and Raman scattering spectra of Si nanocrystals embedded in SiO2 matrix have been studied. Films were deposited by rf magnetron sputtering of compound SiO2/Si targets. Films containing silicon in the form of nanocrystals clusters show intense luminescence at room temperature. Films containing only amorphous Si clusters show little or no FL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and its intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission. (C) 1996 American Institute of Physics.

引用

页码：4148 / 4150

页数：3

共 6 条

[1] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].