Structural and electrical properties of PLZT films on ITO-coated glass prepared by a sol-gel process

被引:11
作者
Jang, NW
Mah, SB
Paik, DS
Choi, HW
Park, CY
机构
[1] Yonsei Univ, Dept Elect Engn, Seodaemun Ku, Seoul 120749, South Korea
[2] Kyungwon Univ, Dept Elect Engn, Soojung Ku, Seongnam 461701, Kyunggi Do, South Korea
关键词
thin films; sol-gel chemistry; X-ray diffraction; Raman spectroscopy; electrical properties;
D O I
10.1016/S0025-5408(99)00136-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
PLZT films prepared by a sol-gel process were fabricated on indium tin oxide (ITO)-coated glass substrates using rapid thermal annealing (RTA). The films crystallized into the perovskite phase when annealed at 750 degrees C for 5 min. X-ray diffraction (XRD) and Raman spectroscopy results indicate that the morphotropic phase boundary of PLZT films shifts toward the Ti-rich side, in contrast to that of bull; ceramics. A dielectric constant of 1270 for the 2/55/45 composition was the maximum value observed. With increasing Zr content in the 2 mol% La modified films, the coercive field decreased from 52.9 to 30 kV/cm and the remanent polarization increased from 22.7 to 50.6 mu C/cm(2) Optical transmittance increased by increasing optical isotropy as the Zr content-increased. (C) 1999 Elsevier Science Ltd.
引用
收藏
页码:1463 / 1472
页数:10
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