Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors

被引:50
作者
Gao, W [1 ]
Kiyono, S [1 ]
Satoh, E [1 ]
机构
[1] Tohoku Univ, Dept Mechatron & Precis Engn, Sendai, Miyagi 980, Japan
基金
日本学术振兴会;
关键词
metrology; spindle; sensor;
D O I
10.1016/S0007-8506(07)61557-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A measuring system consisting of three two-dimensional surface slope sensors is developed for spindle error and roundness measurement. The sensors, which are in the same XY-plane perpendicular to the spindle axis (Z), are placed around a cylindrical workpiece mounted in the spindle, The workpiece out-of-roundness and the X- and Y-directional components of the spindle radial error motion can be separated from each other using the radial direction outputs of sensors. On the other hand, the two-directional components of the spindle angular error motion can be obtained accurately from the angular direction outputs of sensors, Experiments of spindle error and roundness measurement were carried out.
引用
收藏
页码:447 / 450
页数:4
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