Combinatorial (Ba,Sr)TiO3 thin film growth: X-ray diffraction and Raman spectroscopy

被引：14

作者：

Bouyanfif, H. ^{[1
]}

Wolfman, J. ^{[1
]}

El Marssi, M. ^{[2
]}

Yuzyuk, Y. ^{[2
]}

Bodeux, R. ^{[1
,3
]}

Gervais, M. ^{[1
]}

Gervais, F. ^{[1
]}

机构：

[1] Univ Tours, Lab LEMA, CNRS, CEA,UMR 6157, F-37200 Tours, France

[2] Univ Picardie, Phys Mat Condensee Lab, F-80039 Amiens, France

[3] STMicroelectronics, R&D, F-37000 Tours, France

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 106卷 / 03期

关键词：

barium compounds; dielectric thin films; elasticity; epitaxial layers; internal stresses; microwave materials; phonons; pulsed laser deposition; Raman spectra; soft modes; stoichiometry; strontium compounds; vapour phase epitaxial growth; X-ray chemical analysis; X-ray diffraction; SRTIO3;

D O I：

10.1063/1.3190478

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the investigation of the (Ba,Sr)TiO3 (BST) system of technological importance for microwave applications. The development of the combinatorial method enabled us to grow and study a library of samples ranging from BaTiO3 to SrTiO3 (ST) deposited on MgO substrate. The spatial control of the stoichiometry and of the structure has been evidenced and probed using energy dispersive x-ray spectroscopy, high resolution x-ray diffraction, and Raman spectroscopy. A global and coherent picture emerged from the complex interplay between the epitaxial/thermal stress and stoichiometry changes. Taking into account elastic interactions with the substrate we present subtle symmetry changes in the BST library in comparison with the bulk phase diagram such as tetragonal distortion observed on the ST side. Finally underdamped soft mode hardening and polar modes are detected on the high barium and strontium compositions, respectively, highlighting fundamental dynamical/structural differences with their bulk counterparts.

引用

页数：4

共 20 条

[1] Recent advances in pulsed-laser deposition of complex oxides [J].

Christen, H. M. ;

Eres, G. .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2008, 20 (26)

[2] LATTICE DYNAMICS + PHASE TRANSITIONS OF STRONTIUM TITANATE [J].

COWLEY, RA .

PHYSICAL REVIEW, 1964, 134 (4A) :A981-+

[3] Folded acoustic phonons and soft mode dynamics in BaTiO3/SrTiO3 superlattices -: art. no. 132302 [J].

Das, RR ;

Yuzyuk, YI ;

Bhattacharya, P ;

Gupta, V ;

Katiyar, RS .

PHYSICAL REVIEW B, 2004, 69 (13) :132302-1

[4] Soft mode dynamics and the reduction of Ti4+ disorder in ferroelectric/relaxor superlattices BaTiO3/BaTi0.68Zr0.32O3 [J].

De Guerville, F. ;

El Marssi, M. ;

Raevski, I. P. ;

Karkut, M. G. ;

Yuzyuk, Yu. I. .

PHYSICAL REVIEW B, 2006, 74 (06)

[5] HYPER-RAMAN SCATTERING BY VIBRATIONAL EXCITATIONS IN CRYSTALS, GLASSES AND LIQUIDS [J].

DENISOV, VN ;

MAVRIN, BN ;

PODOBEDOV, VB .

PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 1987, 151 (01) :1-92

[6] Heat capacity, thermal conductivity, and thermal expansion of barium titanate-based ceramics [J].

He, Y .

THERMOCHIMICA ACTA, 2004, 419 (1-2) :135-141

[7] Localized electronic states induced by defects and possible origin of ferroelectricity in strontium titanate thin films [J].

Kim, Y. S. ;

Kim, J. ;

Moon, S. J. ;

Choi, W. S. ;

Chang, Y. J. ;

Yoon, J. -G. ;

Yu, J. ;

Chung, J. -S. ;

Noh, T. W. .

APPLIED PHYSICS LETTERS, 2009, 94 (20)

[8] SECOND-ORDER RAMAN SPECTRUM OF MGO [J].

MANSON, NB ;

VONDEROH.W ;

CHODOS, SL .

PHYSICAL REVIEW B, 1971, 3 (06) :1968-&

[9] Structural evolution and polar order in Sr1-xBaxTiO3 -: art. no. 224104 [J].

Ménoret, C ;

Kiat, JM ;

Dkhil, B ;

Dunlop, M ;

Dammak, H ;

Hernandez, O .

PHYSICAL REVIEW B, 2002, 65 (22) :2241041-2241049

[10] Concurrent evaluation of strain in heteroepitaxial thin films with continuous lattice mismatch spread [J].

Ohtani, M ;

Fukumura, T ;

Kawasaki, M ;

Omote, K ;

Kikuchi, T ;

Harada, J ;

Koinuma, H .

APPLIED PHYSICS LETTERS, 2002, 80 (12) :2066-2068

← 1 2 →