Preparation of thin films by filtered are deposition and ion assisted arc deposition

被引：14

作者：

Zhao, JP

Wang, X

Chen, ZY

Yang, SQ

Shi, TS

Liu, XH

Zou, SC

机构：

[1] Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 127卷

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/S0168-583X(97)00013-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The present work focuses on Filtered Are Deposition (FAD) and Ion Assisted Are Deposition (IAAD) techniques. The properties of TIN, a-diamond and a-C:N films prepared by FAD and IAAD have been investigated in respect to surface morphologies, field emission behavior and optical properties.

引用

收藏

页码：817 / 820

页数：4

相关论文

共 11 条

[1] THE PROPERTIES OF TIN FILMS DEPOSITED BY FILTERED ARC EVAPORATION [J].

BENDAVID, A ;

MARTIN, PJ ;

NETTERFIELD, RP ;

KINDER, TJ .

SURFACE & COATINGS TECHNOLOGY, 1994, 70 (01) :97-106

[2] FIELD-EMISSION FROM P-TYPE POLYCRYSTALLINE DIAMOND FILMS [J].

HONG, D ;

ASLAM, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :427-430

[3]

JANG J, 1996, COMMUNICATION

[4] Diamond-based field-emission displays [J].

Jaskie, JE .

MRS BULLETIN, 1996, 21 (03) :59-64

[5] IONIZATION-ASSISTED EVAPORATIVE PROCESSES - TECHNIQUES AND FILM PROPERTIES [J].

MARTIN, P .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1990, 18 (06) :855-868

[6]

MARTIN PJ, 1993, SURF ENG, V9, P51

[7] REVISED STRUCTURE ZONE MODEL FOR THIN-FILM PHYSICAL STRUCTURE [J].

MESSIER, R ;

GIRI, AP ;

ROY, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :500-503

[8] AVERAGE ENERGY DEPOSITED PER ATOM - A UNIVERSAL PARAMETER FOR DESCRIBING ION-ASSISTED FILM GROWTH [J].

PETROV, I ;

ADIBI, F ;

GREENE, JE ;

HULTMAN, L ;

SUNDGREN, JE .

APPLIED PHYSICS LETTERS, 1993, 63 (01) :36-38

[9]

SAVVIDES N, 1986, J APPL PHYS, V59, P513

[10] CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS AND THEIR APPLICATION AS OVERCOATS ON THIN-FILM MEDIA FOR MAGNETIC RECORDING [J].

TSAI, HC ;

BOGY, DB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (06) :3287-3312