Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems

被引：215

作者：

Franklin, NR ^{[1
]}

Wang, Q ^{[1
]}

Tombler, TW ^{[1
]}

Javey, A ^{[1
]}

Shim, M ^{[1
]}

Dai, HJ ^{[1
]}

机构：

[1] Stanford Univ, Dept Chem, Stanford, CA 94305 USA

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 05期

关键词：

D O I：

10.1063/1.1497710

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A synthetic strategy is devised for reliable integration of long suspended single-walled carbon nanotubes into electrically addressable devices. The method involves patterned growth of nanotubes to bridge predefined molybdenum electrodes, and is versatile in yielding various microstructures comprised of suspended nanotubes that are electrically wired up. The approach affords single-walled nanotube devices without any postgrowth processing, and will find applications in scalable nanotube transistors (mobility up to 10 000 cm(2)/V s) and nanoelectromechanical systems based on nanowires. (C) 2002 American Institute of Physics.

引用

页码：913 / 915

页数：3

共 20 条

[1]

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[2]

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