SU8 protective layers in liquid operating SAWs

被引：10

作者：

Arana, N.

Puente, D.

Ayerdi, I.

Castano, E.

Berganzo, J.

机构：

[1] CEIT, E-20018 San Sebastian, Spain

[2] IKERLAN, Arrasate Mondragon 20500, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 118卷 / 1-2期

关键词：

SAW sensors; liquid viscosity; SU8 protective layers;

D O I：

10.1016/j.snb.2006.04.083

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In some applications, the medium can be aggressive with sensing devices. In this work, an epoxy based resist is proposed as protective layer for a SAW-type viscosity sensor in liquid media, in order to provide the sensor with durability and stability. Love-type devices are developed on ST-quartz substrates. Ti/Ag bilayer and SiO2 are used as IDTs and waveguide materials respectively. SU8-50 is chosen as protective coating. Several configurations are developed. For 20, 30 and 40 mu m wavelengths, transmission signal spectra are obtained and the influence of different device parameters is analyzed. Propagation wave damping is determined for the SAW devices when different viscosity samples are dropped on the sweet spot. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：374 / 379

页数：6

共 8 条

[1]

[Anonymous], 1990, ACOUSTIC FIELDS WAVE

[2] A study of love-wave acoustic sensors [J].

Du, J ;

Harding, GL ;

Ogilvy, JA ;

Dencher, PR ;

Lake, M .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (03) :211-219

[3] Viscosity sensing using a Love-wave device [J].

Jakoby, B ;

Vellekoop, MJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) :275-281

[4] A LOVE WAVE SENSOR FOR (BIO)CHEMICAL SENSING IN LIQUIDS [J].

KOVACS, G ;

VELLEKOOP, MJ ;

HAUEIS, R ;

LUBKING, GW ;

VENEMA, A .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :38-43

[5] Monolithic coupling of a SU8 waveguide to a silicon photodiode [J].

Nathan, M ;

Levy, O ;

Goldfarb, I ;

Ruzin, A .

JOURNAL OF APPLIED PHYSICS, 2003, 94 (12) :7932-7934

[6]

Nguyen N.-T., 2002, FUNDAMENTALS APPL MI, V1

[7]

TURTON AC, 2005, SENS ACTUATORS A

[8] Acoustic wave sensors and their technology [J].

Vellekoop, MJ .

ULTRASONICS, 1998, 36 (1-5) :7-14

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